Book chapter
A study of hydrogen, oxygen and nitrogen bonding in a-Si thin films by IR spectroscopy
Solar World Congess: Proceedings of the Biennial Congress of the International Solar Energy Society, Denver, Colarado, 19-23 August 1991, pp.15-20
Pergamon Press
1992
Abstract
Fourier transform infrared (FTIR) spectroscopy has been used to study the nature of hydrogen, oxygen and nitrogen bonds In a-Si thin films. The samples were prepared by rf sputtering under different deposition conditions to produce hydrogen contents ranging from 15 to 35 at.%. Slightly contaminated samples were found to contain nitrogen and oxygen ranging from 0.0 - 1.5 and 0.0 - 3.0 at.% respectively. Annealing vas performed by heating the samples in a hydrogen atmosphere, usually for 30 minutes, at temperatures ranging from 150 to 550 C. The FTIR spectra, taken for the as-deposited sample and after each annealing step, have been deconvoluted into their component peaks using the simplex algorithm. Our results demonstrate that for a particular type of silicon-hydrogen group, evolution of hydrogen takes place at a lower temperature from the surface and/or the near surface region than from the bulk, On the other hand, oxygen and nitrogen related bonds in the a-Si network change configurations on annealing.
Details
- Title
- A study of hydrogen, oxygen and nitrogen bonding in a-Si thin films by IR spectroscopy
- Authors/Creators
- G. Talukder (Author/Creator)J.C.L. Cornish (Author/Creator)P.J. Jennings (Author/Creator)G.T. Hefter (Author/Creator)C.P. Lund (Author/Creator)B.W. Clare (Author/Creator)J. Livingstone (Author/Creator)
- Contributors
- M.E. Arden (Editor)S.M.A. Burley (Editor)M. Coleman (Editor)
- Publication Details
- Solar World Congess: Proceedings of the Biennial Congress of the International Solar Energy Society, Denver, Colarado, 19-23 August 1991, pp.15-20
- Publisher
- Pergamon Press; Oxford, UK
- Identifiers
- 991005541683307891
- Copyright
- © 1992 International Solar Energy Society
- Murdoch Affiliation
- School of Mathematical and Physical Sciences
- Language
- English
- Resource Type
- Book chapter
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