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A semi-quantitative study of disorder in ion-bombarded crystalline silicon using Auger lineshape analysis
Conference paper

A semi-quantitative study of disorder in ion-bombarded crystalline silicon using Auger lineshape analysis

C.P. Lund, E. Walker, C. Klauber, P.J. Jennings, J.C.L. Cornish, B.W. Clare and G.T. Hefter
9th AINSE Conference on Nuclear Techniques of Analysis and 3rd Vacuum Society of Australia Congress NTA/VSA'95 (Newcastle, NSW, Australia, 27/11/1995–29/11/1995)
1995

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