Preparation and characterization of (Sr1-xTix)O3 and (Ba1-x Srx)TiO3 thin films using ECR plasma assisted MOCVD

Conference paper

K. No, J.S. Lee, H.W. Song, W.J. Lee, B.G. Yu and Z-T Jiang

Cambridge University Press

Ferroelectric Thin films V symposium (San Francisco, Ca, 07/04/1996–12/04/1996)

1996

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Title: Preparation and characterization of (Sr1-xTix)O3 and (Ba1-x Srx)TiO3 thin films using ECR plasma assisted MOCVD
Authors/Creators: K. No (Author/Creator)
J.S. Lee (Author/Creator)
H.W. Song (Author/Creator)
W.J. Lee (Author/Creator)
B.G. Yu (Author/Creator)
Z-T Jiang (Author/Creator)
Conference: Ferroelectric Thin films V symposium (San Francisco, Ca, 07/04/1996–12/04/1996)
Publisher: Cambridge University Press
Identifiers: 991005540105107891
Copyright: Materials Research Society
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Conference paper
Note: Appears in: Ferroelectric Thin films V, MRS Symposium Proceedings Vol. 433, Edited by S. Desu, R. E. Jones, R. Ramesh and B. A. Tuttle, 9 (1996)

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