Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD

Conference paper

J.S. Lee, H.W. Song, D.S. Yoon, B.H. Jun, B.G. Yu, W.J. Lee, Z-T Jiang and K. No

Cambridge University Press

Metal Organic Chemical Vapor Deposition of Electronic Ceramics II Symposium (Boston, MA, 27/11/1995–29/11/1995)

1996

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Title: Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD
Authors/Creators: J.S. Lee (Author/Creator)
H.W. Song (Author/Creator)
D.S. Yoon (Author/Creator)
B.H. Jun (Author/Creator)
B.G. Yu (Author/Creator)
W.J. Lee (Author/Creator)
Z-T Jiang (Author/Creator)
K. No (Author/Creator)
Conference: Metal Organic Chemical Vapor Deposition of Electronic Ceramics II Symposium (Boston, MA, 27/11/1995–29/11/1995)
Publisher: Cambridge University Press
Identifiers: 991005540130207891
Copyright: Materials Research Society
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Conference paper
Note: Appears in Metal Organic Chemical Vapor Deposition of Electronic Ceramics II, MRS Symposium Proceedings Vol. 415, Edited by S. Desu, D. B. Beach and P. C. Van Buskirk, 183 (1996)

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