Details
- Title
- An overview and future development of single layer halftone phase shifting mask materials for Deep UV microlithography
- Authors/Creators
- Z-T Jiang (Author/Creator)S.B. Hong (Author/Creator)E. Kim (Author/Creator)B-S Bae (Author/Creator)K. No (Author/Creator)S. Lim (Author/Creator)S-G Woo (Author/Creator)Y-B Koh (Author/Creator)
- Conference
- The Korean Ceramic Society Conference
- Identifiers
- 991005543486307891
- Murdoch Affiliation
- Murdoch University
- Language
- English
- Resource Type
- Conference presentation
- Note
- Invited talk