Details
- Title
- Large optical band gap Al Cr oxide thin films for Deep UV lithography applications
- Authors/Creators
- Z-T Jiang (Author/Creator)T. Yamaguchi (Author/Creator)M. Aoyama (Author/Creator)K. Ohshimo (Author/Creator)
- Conference
- 22nd Condensed Matter Physics Meeting (Wagga Wagga, Australia, 04/02/1998–06/02/1998)
- Identifiers
- 991005544341307891
- Murdoch Affiliation
- Murdoch University
- Language
- English
- Resource Type
- Conference presentation