Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry

Conference presentation

M. Aoyama, Z-T Jiang and T. Yamaguchi

58th Autumn Meeting (The Japan Society of Applied Physics) (Akida, Japan, 02/10/1997–05/10/1997)

1997

Details

Title: Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry
Authors/Creators: M. Aoyama (Author/Creator)
Z-T Jiang (Author/Creator)
T. Yamaguchi (Author/Creator)
Conference: 58th Autumn Meeting (The Japan Society of Applied Physics) (Akida, Japan, 02/10/1997–05/10/1997)
Identifiers: 991005544542807891
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Conference presentation

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