Quantitative analyses of PECVD processed silicon nitride thin films using AES, XPS and spectroscopic ellipsometry (SE)

Conference presentation

Z-T Jiang, T. Yamaguchi, P. Wilkie and S.M. Thurgate

14th National Congress of the Australia Institute of Physics (Adelaide, South Australia, 10/12/2000–15/12/2000)

2000

Details

Title: Quantitative analyses of PECVD processed silicon nitride thin films using AES, XPS and spectroscopic ellipsometry (SE)
Authors/Creators: Z-T Jiang (Author/Creator)
T. Yamaguchi (Author/Creator)
P. Wilkie (Author/Creator)
S.M. Thurgate (Author/Creator)
Conference: 14th National Congress of the Australia Institute of Physics (Adelaide, South Australia, 10/12/2000–15/12/2000)
Identifiers: 991005542162307891
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Conference presentation

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