Spectroellipsometric study of thin silicon films

Conference presentation

K. Ohshimo, Z-T Jiang, M. Aoyama and T. Yamaguchi

58th Autumn Meeting (The Japan Society of Applied Physics) (Akida, Japan, 02/10/1997–05/10/1997)

1997

Details

Title: Spectroellipsometric study of thin silicon films
Authors/Creators: K. Ohshimo (Author/Creator)
Z-T Jiang (Author/Creator)
M. Aoyama (Author/Creator)
T. Yamaguchi (Author/Creator)
Conference: 58th Autumn Meeting (The Japan Society of Applied Physics) (Akida, Japan, 02/10/1997–05/10/1997)
Identifiers: 991005544088507891
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Conference presentation

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