Journal article
A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)
Ceramics International, Vol.45(6), pp.6875-6884
2019
Abstract
Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical properties of magnetron sputtered Ce/Ti oxide thin films on Si (100) wafers with different Ce:Ti ratios are investigated experimentally and by modelling. X-ray Photoemission Spectroscopy (XPS) and X-ray diffraction (XRD) confirm the primary phases as trigonal Ce2O3 and rutile form of TiO2 with SiO2 present in all prepared materials. FESEM imaging delivers information based on the variation of grain size, the mixed Ce/Ti oxides providing much smaller grain sizes in the thin film/substrate composite. Nanoindentation analysis concludes that the pure cerium oxide film has the highest hardness value (20.1 GPa), while the addition of excess titanium oxide decreases the hardness of the film coatings. High temperature in-situ XRD (up to 1000 °C) results indicate high thermal phase stability for all materials studied. The film with Ce:Ti = 68%:32% has a new additional minor oxide phase above 800 °C. Contact angle experiments suggest that the chemical composition of the surface is insignificant affecting the water contact angle. Results show a narrow band of 87.7–95.7° contact angle. The finite element modelling (FEM) modelling of Ce/Ti thin film coatings based on Si(100); Si(110); silica and steel substrates shows a variation in stress concentration.
Details
- Title
- A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)
- Authors/Creators
- S.B. Patel (Author/Creator)N. Radevski (Author/Creator)N. Mondinos (Author/Creator)X. Zhao (Author/Creator)K. Jack (Author/Creator)J-P Veder (Author/Creator)Z-F Zhou (Author/Creator)Z-T Jiang (Author/Creator)
- Publication Details
- Ceramics International, Vol.45(6), pp.6875-6884
- Publisher
- Elsevier Ltd
- Identifiers
- 991005544657207891
- Copyright
- © 2019 Elsevier Ltd and Techna Group
- Murdoch Affiliation
- School of Engineering and Information Technology
- Language
- English
- Resource Type
- Journal article
Metrics
41 Record Views
InCites Highlights
These are selected metrics from InCites Benchmarking & Analytics tool, related to this output
- Collaboration types
- Domestic collaboration
- International collaboration
- Citation topics
- 5 Physics
- 5.188 Deposition, Hardening & Coating
- 5.188.318 Nitride Coatings
- Web Of Science research areas
- Materials Science, Ceramics
- ESI research areas
- Materials Science