Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

E. Mohammadpour; W.Y.H. Liew; N. Mondinos; M. Altarawneh; S. Lee; N. Radevski; M. Minakshi; A. Amri; H.N. Lim; Z-T Jiang

doi:10.1016/j.jmrt.2022.01.039

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Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

Journal article

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Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions

E. Mohammadpour, W.Y.H. Liew, N. Mondinos, M. Altarawneh, S. Lee, N. Radevski, M. Minakshi, A. Amri, H.N. Lim and Z-T Jiang

Journal of Materials Research and Technology, Vol.17, pp.1122-1131

2022

DOI: https://doi.org/10.1016/j.jmrt.2022.01.039

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Abstract

This study investigates the influence of substrate (AISI M42 tool steel) bias voltage (from −30 to −80 V), on the mechanical properties of magnetron sputtered TiSiN coating derived from Ti and Si targets. Thermal stability, microstructure (crystallite size, microstrain, lattice constant), morphology and mechanical (hardness, Young's modulus, residual stresses) properties, of the deposited TiSiN coatings, were investigated with synchrotron powered X-ray diffraction (SR-XRD), X-ray photoelectron spectroscopy, field emission scanning electron microscopy, and nanoindentation techniques. Rietveld analysis, of the in-situ SR-XRD, in the temperature range of 25–800 °C, demonstrated cubic TiN form in (Ti,Si)N solid solutions, with TiO2 and Ti2O3 identified at lower bias voltages. Density functional theory supplemented the experimental results. Increase in the bias voltage resulted in: (i) a decrease in Si content, (ii) significant smoothening of surface morphology, (iii) change in the phase composition and microstructure, (iv) improved oxidation resistance and thermal oxidation threshold, and (v) hardness and Young's modulus of the coatings increased up to 50% to 33 GPa and 450 GPa, respectively.

Details

Title: Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions
Authors/Creators: E. Mohammadpour (Author/Creator) - Murdoch University
W.Y.H. Liew (Author/Creator) - Universiti of Malaysia Sabah
N. Mondinos (Author/Creator) - Murdoch University
M. Altarawneh (Author/Creator) - United Arab Emirates University
S. Lee (Author/Creator) - Purdue University West Lafayette
N. Radevski (Author/Creator) - Murdoch University
M. Minakshi (Author/Creator) - Murdoch University
A. Amri (Author/Creator) - Riau University
H.N. Lim (Author/Creator) - Universiti Putra Malaysia
Z-T Jiang (Author/Creator) - Murdoch University
Publication Details: Journal of Materials Research and Technology, Vol.17, pp.1122-1131
Publisher: Elsevier B.V.
Identifiers: 991005541078607891
Murdoch Affiliation: College of Science, Health, Engineering and Education; Surface Analysis and Materials Engineering Research Group
Language: English
Resource Type: Journal article

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Collaboration types: Domestic collaboration; International collaboration
Citation topics: 5 Physics; 5.188 Deposition, Hardening & Coating; 5.188.318 Nitride Coatings
Web Of Science research areas: Materials Science, Multidisciplinary; Metallurgy & Metallurgical Engineering
ESI research areas: Materials Science