Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films

C.J. Kim; D.S. Yoon; Z-T Jiang; K. No

doi:10.1023/A:1018536002450

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Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films

Journal article

Peer reviewed

Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films

C.J. Kim, D.S. Yoon, Z-T Jiang and K. No

Journal of Materials Science, Vol.32(5), pp.1213-1219

1997

DOI: https://doi.org/10.1023/A:1018536002450

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Abstract

The crystal orientations of lead zirconate titanate (PZT) thin films have been investigated by using various drying temperatures in the sol–gel process. The films were dried at different temperatures between 310 and 350°C for pyrolysis and then were heat treated at 650°C using rapid thermal annealing (RTA). TG/DTA and FTIR spectroscopy were used to detect the remnants of organic materials in the thin films prior to the final heat treatment. In order to examine the relationship between the film orientation and the remaining organic materials for the prior and final heat treatment, the films were fabricated with different coating cycles and dried for different holding times and then annealed at 650°C. The preferred orientations were investigated using X-ray diffraction.

Details

Title: Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films
Authors/Creators: C.J. Kim (Author/Creator) - Korea Advanced Institute of Science and Technology
D.S. Yoon (Author/Creator) - Korea Advanced Institute of Science and Technology
Z-T Jiang (Author/Creator) - Korea Advanced Institute of Science and Technology
K. No (Author/Creator) - Korea Advanced Institute of Science and Technology
Publication Details: Journal of Materials Science, Vol.32(5), pp.1213-1219
Publisher: Springer Verlag
Identifiers: 991005541906007891
Copyright: 1997 Chapman & Hall
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Journal article

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Citation topics: 5 Physics; 5.77 Applied Physics; 5.77.20 Lead-Free Ferroelectrics
Web Of Science research areas: Materials Science, Multidisciplinary
ESI research areas: Materials Science