Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

J.S. Lee; H.W. Song; K.S. Kim; B.G. Yu; Y.H. Jeong; Z-T Jiang; K No

doi:10.1116/1.580479

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Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Journal article

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Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

J.S. Lee, H.W. Song, K.S. Kim, B.G. Yu, Y.H. Jeong, Z-T Jiang and K No

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol.15(1), pp.72-76

1997

DOI: https://doi.org/10.1116/1.580479

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Abstract

The decomposition and the degradation characteristics of Ba(TMHD)2 and Sr(TMHD)2 with storage time were analyzed using differential scanning calorimetry. Mass spectrometer monitoring of source vapors with Ar and NH3 carrier gases in an electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition system was also performed. Introducing NH3 as a carrier gas, significantly improved the volatility and the thermal stability of the precursors, as well as the uniformity and the surface smoothness of strontium carbonate films. Required vaporization temperatures of the precursors were lower with the introduction of NH3 gas than with conventional Ar carrier gas. The degradation with the storage time and with oligmerization at the evaporation temperature for Ba(TMHD)2 was greater compared to Sr(TMHD)2.

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Title: Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition
Authors/Creators: J.S. Lee (Author/Creator)
H.W. Song (Author/Creator)
K.S. Kim (Author/Creator)
B.G. Yu (Author/Creator)
Y.H. Jeong (Author/Creator)
Z-T Jiang (Author/Creator)
K No (Author/Creator)
Publication Details: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol.15(1), pp.72-76
Publisher: American Vacuum Society
Identifiers: 991005541917107891
Copyright: 1997 American Vacuum Society
Murdoch Affiliation: Murdoch University
Language: English
Resource Type: Journal article

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Collaboration types: Domestic collaboration
Citation topics: 5 Physics; 5.77 Applied Physics; 5.77.20 Lead-Free Ferroelectrics
Web Of Science research areas: Materials Science, Coatings & Films; Physics, Applied
ESI research areas: Materials Science