Journal article
Simulation and analysis of X-ray photoemission and Auger valence band spectra of hydrogenated amorphous silicon
Thin Solid Films, Vol.326(1-2), pp.160-165
1998
Abstract
The X-ray photoemission (XPS) and Auger electron spectra (AES) of amorphous silicon have been simulated using the semi-empirical quantum mechanical molecular modelling package, MOPAC. The calculated spectra compare well with those obtained experimentally and provide a basis for the interpretation and analysis of the features in the experimental spectra. Changes in the spectra as a result of hydrogenation of the material are also analysed. The results of this study illustrate how simulation of XPS and AES spectra can be used to obtain semi-quantitative information about the hydrogen content and the type of Si-H bonding present in amorphous silicon alloys.
Details
- Title
- Simulation and analysis of X-ray photoemission and Auger valence band spectra of hydrogenated amorphous silicon
- Authors/Creators
- B.W. Clare (Author/Creator)P.J. Jennings (Author/Creator)C.P. Lund (Author/Creator)J.C.L. Cornish (Author/Creator)G. Hefter (Author/Creator)
- Publication Details
- Thin Solid Films, Vol.326(1-2), pp.160-165
- Publisher
- Elsevier BV
- Identifiers
- 991005542030707891
- Copyright
- © 1998 Elsevier Science S.A. All rights reserved.
- Murdoch Affiliation
- School of Chemical and Mathematical Science
- Language
- English
- Resource Type
- Journal article
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