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Simulation and analysis of X-ray photoemission and Auger valence band spectra of hydrogenated amorphous silicon
Journal article   Peer reviewed

Simulation and analysis of X-ray photoemission and Auger valence band spectra of hydrogenated amorphous silicon

B.W. Clare, P.J. Jennings, C.P. Lund, J.C.L. Cornish and G. Hefter
Thin Solid Films, Vol.326(1-2), pp.160-165
1998
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Abstract

The X-ray photoemission (XPS) and Auger electron spectra (AES) of amorphous silicon have been simulated using the semi-empirical quantum mechanical molecular modelling package, MOPAC. The calculated spectra compare well with those obtained experimentally and provide a basis for the interpretation and analysis of the features in the experimental spectra. Changes in the spectra as a result of hydrogenation of the material are also analysed. The results of this study illustrate how simulation of XPS and AES spectra can be used to obtain semi-quantitative information about the hydrogen content and the type of Si-H bonding present in amorphous silicon alloys.

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