Journal article
Spectroscopic ellipsometry of TaNx and VN films
Thin Solid Films, Vol.455-56, pp.473-477
2004
Abstract
We report on spectro-ellipsometric investigations of reactively sputtered tantalum nitride (TaNx/SiO2) and vanadium nitride (VN/Si) films. Several TaNx layers with different deposition temperatures (200–400 °C) and a VN layer were prepared optically thick and analyzed using the bulk formula. For thin TaNx layers prepared with the same temperatures as thick layers, the Drude–Lorentz parameterization of dielectric functions was used by simultaneous fitting of ellipsometric and optical transmittance spectra. VN pseudo-dielectric functions show strong metallic character, which is typical for other transition metal nitrides. In contrast, the TaNx dielectric constants obtained here range from a metallic to a non-metallic character depending on substrate temperature, but independent of the film thickness. This substrate temperature dependence may be due to multiple phases in the TaNx films.
Details
- Title
- Spectroscopic ellipsometry of TaNx and VN films
- Authors/Creators
- J. Mistrik (Author/Creator) - Shizuoka UniversityK. Takahashi (Author/Creator) - Shizuoka UniversityR. Antos (Author/Creator) - Shizuoka UniversityM. Aoyama (Author/Creator) - Shizuoka UniversityT. Yamaguchi (Author/Creator) - Shizuoka UniversityY. Anma (Author/Creator) - Shizuoka UniversityY. Fukuda (Author/Creator) - Shizuoka UniversityM.B. Takeyama (Author/Creator) - Kitami Institute of TechnologyZ-T Jiang (Author/Creator) - Murdoch UniversityS. Thurgate (Author/Creator) - Murdoch UniversityG.V. Riessen (Author/Creator)
- Publication Details
- Thin Solid Films, Vol.455-56, pp.473-477
- Publisher
- Elsevier BV
- Identifiers
- 991005540283607891
- Copyright
- 2003 Elsevier B.V.
- Murdoch Affiliation
- School of Engineering and Energy
- Language
- English
- Resource Type
- Journal article
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- Collaboration types
- Domestic collaboration
- International collaboration
- Citation topics
- 5 Physics
- 5.188 Deposition, Hardening & Coating
- 5.188.318 Nitride Coatings
- Web Of Science research areas
- Materials Science, Coatings & Films
- Materials Science, Multidisciplinary
- Physics, Applied
- Physics, Condensed Matter
- ESI research areas
- Materials Science